Abstract:This paper explored the beam tracking control technology of piezoelectric fast steering mirror (PFSM) which is widely used in the application of free space laser communication, adaptive optics, target acquisition and tracking and so on. With the problems of low tracking precision, low closed loop bandwidth, and potential instability, it is urgent to investigate the tracking precision and dynamic response performance of the steering mirror control system. Firstly, the development of piezoelectric fast steering mirror at home and abroad and the structure of the steering mirror control system are introduced. Then, the key factors of hysteresis, resonance and all disturbances are discussed comprehensively which limit the improvement of the system tracking performance. And the corresponding experimental results are analyzed and compared. It summarized that the high precision and stability control of PFSM over broadband frequencies is still a challenge, as most of the current research only focused on part of performance indexes and lack systematicness. Finally, it was pointed out that using the systematic modeling method and modern intelligent control algorithm is the future development direction to further improve the control system performance.