A piezoelectric d31 modebased MEMS vibration energy harvester with eight cantilever beamcenter quality block structure for low frequency applications which converts environment vibration energy into electric energy is designed in this paper. The heterogeneous integration manufacturing of the PZT piezoelectric thin film is implemented by the SolGel process, and the effective size of the single PZT piezoelectric sensing cell is 935 μm×160 μm×1.5 μm. The functional structure of the vibration energy harvester is fabricated by using MEMS micromachining technology with the effective volume of 9.936×10-4 cm3. The output performance is tested by using vibration testing system. The results show that the output voltage peakpeak value of the proposed energy harvester is up to 232 mV at the resonant frequency of 60Hz and the acceleration driving of 1g（g=9.8 m/s2）. When a 3.0 MΩ load is loaded at its two ends, the maximum output power is up to 6×10-4 μW, the output power density is 0.604 μW/cm3, and the effective area output power density of PZT cell is 0.025 μW/cm2.