Micro force metrology has been widely used with the development of micro/nano technology, biomedicine, aerospace and other fields. The cantilevers with the spring constant ranged from 0.041～21.125 N/m have been designed for the demand. By utilizing optimal combinations of microfabrication processing techniques, the cantilevers were created from SOI wafers. The processing results indicate that the products have the size accuracy of 0.2% and the uniformity and stability are controllable.