Aiming at the operating requirements of acoustooptic tunable filter (AOTF), the deposition experiment on several usually used film materials for AOTF has been carried out. The adhesive forces of these film materials have been tested by using the conventional tearing method and the nanoscratch method. TiO2 and SiO2 have been chosen as the high and low refrative index film materials respectively, and the optimized designs of the film series have been performed based on different schemes. By using electron beam evaporation and ion beam assisted deposition technology，the 400~1 000 nm broadband antireflection films with high adhesion and high spectral transmittance are deposited on TeO2 substrate.