抗过载微陀螺结构的高灵敏设计与仿真
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国家自然基金资助项目(61571405;62201070516);山西省攻关基金资助项目(201303220054)

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HighSensitivity Design and Simulation of a High Overload MEMS Gyroscope Structure
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    摘要:

    为解决高过载微陀螺难以实现高灵敏检测的问题,设计了一种高灵敏且高过载的微陀螺结构。设计的微陀螺结构驱动模态与检测模态的频率高度匹配,提高了微陀螺的结构灵敏度。该微陀螺采用面内检测方式,驱动与检测模态阻尼类型主要为滑膜阻尼,实现了在大气压环境下微陀螺的高品质因数Q值设计。微陀螺均采用双悬臂梁设计,增加了微陀螺结构的稳定性,进而提高了其抗过载能力。最后通过微陀螺的器件级仿真,得到了所设计陀螺结构在驱动方向过载能力约为100 000g(g=9.8 m/s2),检测方向过载能力约为70 000g的前提下,结构灵敏度为53 nm/[(°)/s]。

    Abstract:

    In order to solve the problem of highly sensitive detection of high overload micro gyroscope, a micro gyroscope structure with high sensitivity and high overload. The frequencies of the designed microgyroscope at the driving modal and detection modal are highly matched, thus the structure sensitivity are improved. The inplane detection appraoch is sdopted and the typical damping type of the driving and detection modals is synovial damping. The high Qfactor design of the micro gyroscope at atmospheric pressure is realized. The proposed microgyro adopts double cantilever beam design, thus the stability of the micro gyroscope structure is increased, and the antioverload ability is improved. The devicelevel simulation of the proposed microgyro show that its structural sensitivity is 53 nm/[(°)/s] under the situations of about 100 000g(g=9.8 m/s2)of the computational overload capacity in driving direction and of about 70 000g of the computational overload capacity in detection direction.

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褚伟航,李孟委,王宾,吴承根.抗过载微陀螺结构的高灵敏设计与仿真[J].压电与声光,2016,38(5):833-836. CHU Weihang, LI Mengwei, WANG Bin, WU Chenggen. HighSensitivity Design and Simulation of a High Overload MEMS Gyroscope Structure[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 在线发布日期: 2016-10-18
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