Because of the hysteresis effect of piezoelectric ceramic, in order to control the piezoelectric oscillating table better and reduce the influence of the hysteresis effect on the control system, The PrandtlIshlinskii (PI ) hysteresis model of the oscillating table is established by the transformation of coordinates first. The inverse model of the PI model is solved and the feedforward compensation controller is designed to have a good linearity between the output and the input angels. Finally, on the basis of PI model, the compound control system is built by adding PID feedback controller and the positioning accuracy is improved significantly. The experimental results show that the maximum error of positioning is 2.2 μrad and the control effect of system is excellent.