无铅压电叠层驱动器极化工艺及驱动性能研究
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国家自然科学基金资助项目(51372197);陕西省重点科技创新团队基金资助项目(2014KCT04);陕西省国际科技合作重点基金资助项目(2012KW10)

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Study on the Polarizing Technique and Driving Performance of Stack Actuator Based on Leadfree Piezoelectric Ceramic
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    摘要:

    为提升Na0.5Bi0.5TiO3K0.5Bi0.5TiO3(NBTKBT)系无铅压电陶瓷压电性能,开发新型无铅压电叠层驱动器,该文采用单因素方差分析与正交试验设计方法优化研究了0.8NBT0.2KBT压电陶瓷的极化工艺,最优极化工艺为极化电场6 kV/mm,极化温度70 ℃,极化时间50 min,保压时间21 min,测得压电系数〖WTBX〗d〖WTBZ〗33达到108 pC/N;制备了无铅陶瓷叠层驱动器,并基于三角放大原理和柔性铰链结构设计一种新型外置放大机构,分别对有无外置放大机构的叠层驱动器微位移量进行对比测试,结果表明,与有外置放大机构的叠层驱动器相比,直接驱动的叠层驱动器位移量放大了3.7倍,在150 V驱动电压下位移量达到25 μm。这种无铅压电陶瓷驱动器具有大位移量、稳定性及低成本等特性,有望应用于微精密定位系统领域。

    Abstract:

    To promote the performance of NBTKBT leadfree piezoelectric ceramics and develop new leadfree piezoelectric stack actuators, the polarizing process of 0.8NBT0.2KBT piezoelectric ceramics has been studied by the mono factor analysis of variance and the orthogonal test. The results showed that the piezoelectric constant d33 reached to 108 pC/N with the poling field of 6 kV/mm and temperature of 70 ℃ for the poling time of 50 mins and holding time of 21 mins. A leadfree piezoelectric stack actuator with a new type of external displacement magnifying mechanism was fabricated on the basis of triangle amplification principle and flexure hinge structure. The results showed that the displacement of the directively driving stack actuator has been magnified 3.7 times and the remarkable displacement of 25 μm was achieved under a driving voltage of 150 V comparing with the stack actuator with external displacement magnifying mechanism. The leadfree piezoelectric ceramic stack actuator has the features of large displacement, good stability and lowcost, and will start a new scope of application to the microprecision positioning system.

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姚萌, 杜慧玲, 史翔, 安群力, 任广林.无铅压电叠层驱动器极化工艺及驱动性能研究[J].压电与声光,2017,39(1):92-96. YAO Meng, DU Huiling, SHI Xiang, AN Qunli, REN Guanglin. Study on the Polarizing Technique and Driving Performance of Stack Actuator Based on Leadfree Piezoelectric Ceramic[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 在线发布日期: 2017-02-14
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