基于声表面波形状记忆合金微阀研究
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常州工学院科研基金资助项目(YN1404);江苏省创新基金资助项目(201511055039X)

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Study on A Shape Memory Alloy Microvalve Based on Surface Acoustic Wave
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    摘要:

    研制了一种声表面波控制的形状记忆合金微阀。在128°-YX-LiNbO3基片上光刻叉指换能器,其激发的声表面波加热压电基片上石蜡油,使弯曲的形状记忆合金线伸展,促使与其连接的聚二甲基硅氧烷微通道壁发生形变,截止微通道,实现微阀从开态向关态转变。撤除电信号,形状记忆合金线温度下降,恢复软性,在硬质塑料薄片的恢复力作用下,微阀重新由关态转为开态。以流体输运为实验对象进行微阀开关实验,结果表明,声表面波可有效控制形状记忆合金微阀的开关操作,在28.5 dBm电信号功率作用下,微阀关闭时间为40.4 s。

    Abstract:

    A new shape memory alloy (SMA) microvalve controlled by surface acoustic wave is presented in this paper. An IDT is fabricated on a 128°-YX-NbO3 substrate for exciting surface acoustic wave, which is used to heat paraffin oil on the piezoelectric substrate. A bent shape memory alloy wire is then expended due to the heat exchange of paraffin oil, and leads the wall of the polydimethylsiloxane microchannel to have a deformation and the microvalve is closed, thus can realize the transition from on to off. When the electric signal is removed, the shape memory alloy wire is become soft due to temperature reduction. The microchannel is open again by the recovery force of a plastic sheet, and the microvalve is then in on state. The fluid transportation is used to demonstrate the operation of the SMA microvalve. The results show that the surface acoustic wave can control the onoff operation of SMA valve effectively. The switching off time of the SMA microvalve is 40.4 when the electric signal power is 28.5 dBm.

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李向莉, 钱显毅.基于声表面波形状记忆合金微阀研究[J].压电与声光,2017,39(1):153-156. LI Xiangli, QIAN Xianyi. Study on A Shape Memory Alloy Microvalve Based on Surface Acoustic Wave[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 在线发布日期: 2017-02-14
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