Abstract:A new shape memory alloy (SMA) microvalve controlled by surface acoustic wave is presented in this paper. An IDT is fabricated on a 128°-YX-NbO3 substrate for exciting surface acoustic wave, which is used to heat paraffin oil on the piezoelectric substrate. A bent shape memory alloy wire is then expended due to the heat exchange of paraffin oil, and leads the wall of the polydimethylsiloxane microchannel to have a deformation and the microvalve is closed, thus can realize the transition from on to off. When the electric signal is removed, the shape memory alloy wire is become soft due to temperature reduction. The microchannel is open again by the recovery force of a plastic sheet, and the microvalve is then in on state. The fluid transportation is used to demonstrate the operation of the SMA microvalve. The results show that the surface acoustic wave can control the onoff operation of SMA valve effectively. The switching off time of the SMA microvalve is 40.4 when the electric signal power is 28.5 dBm.