薄膜体声波滤波器的发展现状
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The Stateoftheart of Film Bulk Acoustic Wave Resonators Filter
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    摘要:

    薄膜体声波谐振(FBAR)滤波器具有体积小,性能高,一致性及可制造性好等优势,相关产品已被广泛应用于移动通信市场。通过对FBAR技术的基本原理和器件结构,讨论了FBAR技术的现状及发展趋势,表明其未来向宽带化,高功率化,高温度稳定性及小型化等方向发展。

    Abstract:

    Thin film bulk acoustic wave resonator(FBAR) filter has many advantages of small size, high performance, good consistency and manufacturability. The related products have been widely used in the mobile communications market. Based on the basic principle of FBAR technology and the structure of the device, the present situation and development trend of FBAR technology are discussed in this paper. It is indicated that the future of FBAR filter technology will be developed to the direction of broadband, high power, high temperature stability and miniaturization.

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徐学良, 陆玉姣, 杨柳, 杜波, 蒋欣, 马晋毅.薄膜体声波滤波器的发展现状[J].压电与声光,2017,39(2):163-166. XU Xueliang, LU Yujiao, YANG Liu, DU Bo, JIANG Xin, MA Jinyi. The Stateoftheart of Film Bulk Acoustic Wave Resonators Filter[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 在线发布日期: 2017-04-01
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