采用变间隔阈值PI模型的压电平台前馈控制
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浙江省高等学校中青年学科带头人学术攀登项目(pd2013091)

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Feedforward Control of a Piezoelectric Stage Using Variable-interval Threshold PI Model
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    摘要:

    为提高压电微动平台在运动过程中的定位精度,设计前馈控制器来控制平台输出位移。首先,根据压电微动平台迟滞曲线的特点,在不降低模型精度要求的前提下,对迟滞曲线非线性较大区域进行细密划分,对线性较好区域进行稀疏划分,进而建立了变间隔阈值的平台 PrandtlIshilinskii(PI)迟滞模型;接着,通过对所建平台迟滞模型求逆,给出了平台的前馈控制算法;最后,将所设计的前馈控制器作用于平台,对其进行了实际控制。结果表明,在4 μm的目标阶跃激励下,平台的响应时间为0.01 s,无超调,稳态误差中线从无控制时的0.4~0.5 μm减小为0~0.2 μm;在最大值为20.7 μm的幅值衰减三角波输入作用下,平台定位误差中线的最大正负差值从无控制时的3.82 μm减小到1.15 μm。所设计的控制器可有效减小压电微动平台的迟滞误差。

    Abstract:

    To improve the positioning accuracy of the piezoelectric microstage, a feedforward controller is designed to control the output displacement of the stage. Firstly, without reducing the accuracy requirement, the hysteresis curve section with larger nonlinearity is subdivided and the section with better linearity is sparsely divided according to the characteristics of the hysteresis curve of the piezoelectric microstage. Then, a PrandtlIshilinskii (PI) hysteresis model with variableinterval thresholds is established. Afterwards, the feedforward control algorithm of the stage is given by inverting the hysteresis model of the stage. Finally, the designed feedforward controller is applied to the stage and the actual control experiments are conducted. The results show that the response time of the stage is 0.01 s and no overshoot phenomenon occurs under the desired step excitation of 4 μm. Meanwhile, the steadystate error midline is reduced from 0.4~0.5 μm (without control) to 0~0.2 μm. For an attenuated triangular wave with the maximum amplitude of 20.7 μm, the maximum positivenegative deviation of the positioning error midline of the stage is reduced from 3.82 μm (without control) to 1.15 μm. Accordingly, the hysteresis error of the piezoelectric microstage can be effectively reduced by the designed controller.

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孙中梁, 崔玉国, 刘康, 万光继, 赵余杰, 李勇.采用变间隔阈值PI模型的压电平台前馈控制[J].压电与声光,2017,39(3):374-377. SUN Zhongliang, CUI Yuguo, LIU Kang, WAN Guangji, ZHAO Yujie, LI Yong. Feedforward Control of a Piezoelectric Stage Using Variable-interval Threshold PI Model[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 在线发布日期: 2017-06-13
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