Abstract:In order to obtain a 3-D micro-positioning stage with simple and compact structure, a new configuration of the stage is designed by using the parallel structure. First, the structure of the stage is designed based on the rightangle flexible sheet structure, and the designed stage has a large working table and can realize the translation along the x, y direction and the rotation around the z direction. Then, the static characteristics such as displacement, stress and the dynamic characteristics such as modal, frequency response, step response are analyzed by using the finite element analysis method. Finally, the static and dynamic characteristics of the designed stage were tested experimentally. The results showed that the maximum output displacements of the stage at x and y directions are about 24.08 μm and 23.24 μm respectively under the driving voltage of 120 V, the output rotation angle at z direction is about 139 μrad;while the natural frequencies of the stage rotating at x, y and z axis directions are 2.25 kHz, 2.28 kHz, and 4.01 kHz respectively The steady displacements of the stage at x, y directions are 2.40 μm, 2.45 μm respectively under the action of the 50 N step force, and the response time is about 2 ms.