基于有限元方法的三维微动平台设计
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浙江省高等学校中青年学科带头人学术攀登基金资助项目(Pd2013091)

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Design of a 3-D Micro-positioning Stage Based on Finite Element Analysis Method
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    摘要:

    为了获得结构简单、紧凑的三维微动平台,采用并联结构设计平台的新构型。首先,基于直角柔性薄板结构,对微动平台进行了结构设计,所设计平台既可实现x、y方向的平动,又可实现绕z方向的转动,且具有较大的工作台面;然后,采用有限元方法对微动平台的位移、应力等静态特性,以及模态、频率响应、阶跃响应等动态特性进行分析;最后,通过实验对所设计平台的静、动态特性进行了测试。结果表明:在120 V的驱动电压作用下,平台沿x、y方向的最大位移分别为24.08 μm和23.24 μm,绕z方向的转角为139 μrad;平台沿x、y方向及绕z轴的固有频率分别为2.25 kHz,2.28 kHz和4.01 kHz;在50 N的阶跃力作用下,平台沿x、y方向的稳态位移分别为2.40 μm、2.45 μm,响应时间约为2 ms。

    Abstract:

    In order to obtain a 3-D micro-positioning stage with simple and compact structure, a new configuration of the stage is designed by using the parallel structure. First, the structure of the stage is designed based on the rightangle flexible sheet structure, and the designed stage has a large working table and can realize the translation along the x, y direction and the rotation around the z direction. Then, the static characteristics such as displacement, stress and the dynamic characteristics such as modal, frequency response, step response are analyzed by using the finite element analysis method. Finally, the static and dynamic characteristics of the designed stage were tested experimentally. The results showed that the maximum output displacements of the stage at x and y directions are about 24.08 μm and 23.24 μm respectively under the driving voltage of 120 V, the output rotation angle at z direction is about 139 μrad;while the natural frequencies of the stage rotating at x, y and z axis directions are 2.25 kHz, 2.28 kHz, and 4.01 kHz respectively The steady displacements of the stage at x, y directions are 2.40 μm, 2.45 μm respectively under the action of the 50 N step force, and the response time is about 2 ms.

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岳强, 刘文翠, 张研.基于有限元方法的三维微动平台设计[J].压电与声光,2017,39(3):456-461. YUE Qiang, LIU Wencui, ZHANG Yan. Design of a 3-D Micro-positioning Stage Based on Finite Element Analysis Method[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 在线发布日期: 2017-06-13
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