To improve the performance of implementing task system of special vehicle,we designed a silicon micro machined pendulum tiltmeter based on the obliquity effect of micro machined silicon pendulum.The micro machined silicon pendulum sensed the change of angle,then the signal was conditioned and amplified.The linearity of the angle output signal was compensated by using the software.Because of the influence from the environment temperature,micro machined structure and precision of chip, there existed larger time drift and temperature drift in the zero output.The temperature drift was suppressed by using the temperature sensor to collect real time temperature and designing the software algorithm.Then the zero time drift was suppressed by collecting the signals of angle, piecewise fitting the relation between the time and angle signals and mathematical processing.After time and temperature drift compensation,the zero output deviation was ≤10 mV and the starting time was shortened from 20 min to 10 s in different temperature environments.