Abstract:In the fabrication of piezoelectric transducers, the electrode has a direct influence on the important performances, such as resonance and antiresonance frequency, quality factor, electromechanical coupling coefficient, etc. Aiming at the AlN piezoelectric film composite structure, a piezoelectricstructure electromechanical coupling analysis of the 3D model based on electrodeAlNstainless steel structure is carried out by using COMSOL Multiphysics finite element analysis software in this paper. Based on this model, the transducer performance parameters change is studied by altering the electrode thickness and materials, dielectric loss and mechanical loss of piezoelectric layer. The results of the study on the followup to stainless steel as the base of the piezoelectric ultrasonic transducer system has a certain theoretical guidance.