The mechanism of piezoelectric effect and the relationship between the polarization intensity and temperature are analyzed in this paper. And then the pyroelectric effects of LiTaO3 and LiNbO3 are analyzed. These two materials are the substrate materials for fabricating surface acoustic wave filters. 3 samples of white 128°LiNbO3 wafesare selected to do the test. It is found that the pyroelectric effect caused by electrostatic discharge is generally about 6 volts when the temperature changes. But when the temperature changes to -55 ℃ or so, a device appears the oscillating waveform peak-to-peak value of about 25 volts waveform.This static electricity will seriously affect the surface acoustic wave device itself or the post-stage circuit.By analyzing the failure mode of the electrostatic discharge (ESD), the anti-electrostatic method of the device is proposed in this paper. Finally, the scheme of using reduction substrate for antielectrostatic of SAW filter is verified.
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张显洪, 陈彦光, 朱勇, 陈尚权.声表滤波器热释电效应的研究[J].压电与声光,2017,39(6):797-799. ZHANG Xianhong, CHEN Yanguang, ZHU Yong, CHEN Shangquan. Study on Pyroelectric Effect of Surface Acoustic Wave Filter[J]. PIEZOELECTRICS AND ACOUSTOOPTICS