基于压电陶瓷的摩擦可调粘滑定位平台
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国家重大科研仪器设备研制专项基金资助项目(61327811);苏州市科学发展计划纳米技术专项基金资助项目(ZXG201433)

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Friction Adjustable Stick-slip Positioning Stage Based on Piezoelectric Ceramics
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    摘要:

    为了提高粘滑式纳米定位台对不同负载,尤其是大质量负载的适用性,设计了驱动模块化的粘滑定位平台。将质量块、柔性铰链及铰链架一体制造,将压电陶瓷致动器、预紧垫块及预紧螺钉安装在铰链架上,共同组成一个独立的驱动模块,安装在底座的槽内,在调节螺钉的作用下可调整垂直方向的位置,改变与载物台接触面间的摩擦力。对粘滑驱动平台建立动力学模型并进行仿真分析,研究摩擦力对平台性能的影响。实验结果表明,负载200 g时,平台的最小步长为8.84 nm,最大速度为3.727 mm/s,行程约20 mm;2 kg负载下,未调节摩擦时最大速度为2.373 mm/s,调节摩擦力后最大速度为3.063 mm/s。实验证明,该设计能同时满足小尺寸、高精度、高速度、大行程及适应大负载的要求。

    Abstract:

    A stick-slip nano-positioning stage with drive modular is designed to improve the applicability of different load, especially large load.A mass block, a flexure hinge, a frame are integrated manufactured.A piezoelectric ceramic actuator, a preload block, a preload screw are installed in the frame, which constitute the drive module together. The drive module is installed in a groove of the base.The vertical position of the drive module can be adjusted by rotating adjustment screw to change the friction between the contact surface of the object stage.The kinetic model of stick-slip positioning stage is established and simulated to analyze the influence of friction on the performance of stage. The experimental results show that the positioning stage has minimum step size of 8.84 nm,maximum velocity of 3.727 mm/s and the stroke of about 20 mm with 200 g load. After adjusting friction, the stage has a maximum velocity of 3.063 mm/s with 2 kg load,which is 2.373 mm/s without adjustment.The experiment verifies that the design can meet the requirements of small size,high precision, large velocity, large stroke and large load.

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杨飞雨, 潘鹏, 徐伟, 汝长海.基于压电陶瓷的摩擦可调粘滑定位平台[J].压电与声光,2017,39(6):825-828. YANG Feiyu, PAN Peng, XU Wei, RU Changhai. Friction Adjustable Stick-slip Positioning Stage Based on Piezoelectric Ceramics[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 在线发布日期: 2017-11-24
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