Abstract:A stick-slip nano-positioning stage with drive modular is designed to improve the applicability of different load, especially large load.A mass block, a flexure hinge, a frame are integrated manufactured.A piezoelectric ceramic actuator, a preload block, a preload screw are installed in the frame, which constitute the drive module together. The drive module is installed in a groove of the base.The vertical position of the drive module can be adjusted by rotating adjustment screw to change the friction between the contact surface of the object stage.The kinetic model of stick-slip positioning stage is established and simulated to analyze the influence of friction on the performance of stage. The experimental results show that the positioning stage has minimum step size of 8.84 nm,maximum velocity of 3.727 mm/s and the stroke of about 20 mm with 200 g load. After adjusting friction, the stage has a maximum velocity of 3.063 mm/s with 2 kg load,which is 2.373 mm/s without adjustment.The experiment verifies that the design can meet the requirements of small size,high precision, large velocity, large stroke and large load.