电荷驱动在高速压电致动平台中的应用
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国家自然科学基金资助项目(51175488);国家科技支撑计划资助项目(2015BAK34B02)

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Application of Charge Drive to High-speed Piezoelectric-Actuated Platforms
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    摘要:

    一个高速压电驱动平台的性能经常被支撑结构的低谐振频率所限制。采用一种非对称致动器可消除传到基座上的惯性力,但传统的电压驱动方法会引起严重的率相关迟滞,惯性力补偿效果不佳。该文提出采用电荷驱动法来消除非对称致动器产生的惯性力。实验表明,在激励电压峰-峰值为20 V时,采用电荷驱动法,在110 Hz~10 kHz内惯性力基本消除,补偿效果比电压驱动方法好。

    Abstract:

    The performance of a high-speed piezoelectric drive platform is often limited by the low resonant frequency of the support structure. The use of an asymmetric actuator can eliminate the inertial force transmitted to the base.But the traditional voltage drive method can cause severe rat-dependent hysteresis, and the inertial force compensation is not effective. In this paper, the charge drive method is proposed to eliminate the inertial force generated by the asymmetric actuator. The experiments show that the inertial force can be eliminated substantially in the range of 110 Hz to 10 kHz by the charge drive method at an excitation voltage of 20 V. The compensation effect is significantly advantageous over the voltage drive method.

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张康, 李伟, 陈建, 冯志华.电荷驱动在高速压电致动平台中的应用[J].压电与声光,2017,39(6):856-859. ZHANG Kang, LI Wei, CHEN Jian, FENG Zhihua. Application of Charge Drive to High-speed Piezoelectric-Actuated Platforms[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 在线发布日期: 2017-11-24
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