压电尺蠖直线电机的设计
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压电尺蠖电机驱动式两自由度大行程高分辨率并联解耦精密定位平台的研究基金资助项目(No.51675288)

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Design of A Piezoelectric Linear Motor Based on Inchworm Motion
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    摘要:

    为实现大行程、高分辨率精密驱动,该文提出了一种压电尺蠖直线电机的设计方法。首先,基于尺蠖运动原理,对电机进行了结构设计,它包括左、右箝位机构、驱动机构和输出轴,左、右箝位机构结构相同,用来对输出轴交替箝位与释放,驱动机构可以微米级及纳米级地步进输出位移,在左、右箝位机构及驱动机构的共同作用下,输出轴可连续输出大行程直线位移,该电机结构简单紧凑,便于调节,并可断电自锁;其次,采用有限元法对箝位机构及驱动机构进行了仿真分析,初步获得了电机的静、动态特性;最后,基于所搭建的实验系统,对电机的静、动态特性进行了测试。结果表明,在5 mm的运动范围内,电机输出位移具有良好的直线性;在50 Hz的驱动电压作用下,电机运动速度为59.1 μm/s;电机输出位移具有较高的分辨率,达到21 nm。

    Abstract:

    In order to realize the largestroke and highresolution precision driving, a design method of piezoelectric inchworm linear motor is proposed. Firstly, based on the principle of inchworm movement, the structure of the motor is designed. It includes the left clamping mechanism, the right clamping mechanism, the driving mechanism and the output shaft. The left and right clamping mechanisms have the same structure and are used for alternately clamping the output shaft and releasing, the drive mechanism can stepout the displacement with micronscale and nanoscale. Under the joint action of the left clamping mechanism and the right clamping mechanism, the output shaft can continuously output a largestroke linear displacement. The motor’s structure is simple and compact, easy to adjust and can be powered off and selflocked. Secondly, the static and dynamic characteristics of the clamping and driving mechanism were analyzed with the finite element method. Finally, based on the constructed experimental system, the static and dynamic characteristics of the motor were tested. The results show that the output displacement of the motor has good linearity within the movement range of 5 mm. Under the driving voltage of 50 Hz, the motor’s working velocity is 59.1 μm/s. And the output displacement of the motor has a high resolution of 21 nm.

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赵余杰,孙庆龙,张志豪,应志奇,周鹏飞,黄金磊,崔玉国.压电尺蠖直线电机的设计[J].压电与声光,2018,40(2):206-210. ZHAO Yujie, SUN Qinglong, ZHANG Zhihao, YING Zhiqi, ZHOU Pengfei, HUANG Jinlei, CUI Yuguo. Design of A Piezoelectric Linear Motor Based on Inchworm Motion[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 在线发布日期: 2018-04-16
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