Abstract:A piezoelectric vibration energy harvester with windmill structure is designed based on MEMS. The low frequency vibration energy is converted into electric energy by piezoelectric effect, so as to solve the problem of low frequency energy acquisition in the environment. The piezoelectric vibration energy harvester uses silicon as the substrate, with PZT5A as piezoelectric material, including upper and lower electrodes; four cantilever beams are rotated to connect the center mass blocks with fixed ends around, which is similar to the windmill structure. The results of mathematical modeling and finite element analysis indicate that under the same sizes and materials of the structure, the arc windmill type structure has lower resonant frequency than the direct connection and the right angle connection structure. The farther the 4 cantilever beams are from the center mass, the lower the resonant frequency. At 0.1g(g=9.8 m/s2) acceleration resonant, the output voltage is about 6.2 V, and the maximum displacement is close to 1.2 mm. On the basis of MEMS process, the process flow of windmill vibration energy harvester is studied and defined by IntelliSuite software.