体声波滤波器自动布局工具的设计开发
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国家自然科学基金资助项目(61574131);中国工程物理研究院超精密加工技术重点实验室基金资助项目(2014ZA001);核探测与核电子学国家重点实验室开放课题基金资助项目(2016KF02);西南科技大学特殊环境机器人技术四川省重点实验室开放基金资助项目(14ZXTK01);西南科技大学研究生创新基金资助项目(16ycx101)

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Design and Develop of Bulk Acoustic Wave Filter Autolayout Tool
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    摘要:

    为了实现体声波(BAW)滤波器版图的自动排布和构建滤波器的三维模型,开发了一款体声波滤波器自动布局工具。根据文献提出的BAW梯形滤波器布局设计流程,基于.NET平台,使用C#语言,创建生成滤波器版图的功能界面。根据输入的薄膜体声波谐振器(FBAR)个数和面积大小生成对应的多边形外接圆,通过FBARs的串并联连接情况,生成放置外接圆的位置,并生成多边形。生成多边形后,用户只需对其进行微调(拖动、旋转等),即可在保证滤波器性能的情况下,得到面积尽可能小的版图。在所完成的滤波器版图基础上,根据滤波器的结构参数和建模方式, 在AutoCAD中导入写好的动态链接库,创建生成滤波器三维模型的功能界面。输入FBAR膜层厚度等参数后,软件自动生成滤波器的三维模型。并自动保存为可导入电磁仿真软件的dwg文件或sat文件,方便滤波器的电磁仿真。设计开发过程中所用滤波器的结构参数等即为该文验证所设计软件的案例。证明了所开发软件的可行性。即软件在保证滤波器性能的情况下,最大限度地缩小版图面积,提高滤波器在晶圆上的面积利用率,且节省了滤波器设计人员的时间和精力。

    Abstract:

    In order to realize the autolayout and build the threedimensional model of the bulk acoustic wave filter, an autolayout tool for the bulk acoustic wave (BAW) filter is developed. According to the BAW ladder filter layout design process proposed in the literature, the function interface of filter layout is created based on the .NET platform by using C# language. The corresponding polygon circumcircles are generated according to the number of input numbers of film bulk acoustic resonators (FBARs) and the size of the area; and the positions of placing the circumcircles and the polygon are generated according to the series and parallel connection situations of FBARs. After generating the polygons, the users only need to fine tune (drag, rotate, etc.) the polygons to get the layout area as small as possible but guarantee the performance of the filter. On the basis of the completed filter layout, according to the structural parameters of the filter and the modeling method, the written dynamic link library is imported into AutoCAD to create a functional interface for generating the threedimension model of the filter. After entering the thickness and other parameters of FBARs, the 3D model of filter is automatically generated by the software, and it is automatically saved as a dwg file or a sat file that can be introduced into the electromagnetic simulation software to facilitate electromagnetic simulation of the filter. The structural parameters of the filter used in the design and development process are the cases of the design software verified in this paper. The feasibility of the developed software is proved, that is, the software minimizes the layout area, improves the area utilization of the filter on the wafer and saves the time and effort of the filter designer while ensuring the filter performance.

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贾乐,高杨,张大鹏.体声波滤波器自动布局工具的设计开发[J].压电与声光,2018,40(4):483-486. JIA Le, GAO Yang, ZHANG Dapeng. Design and Develop of Bulk Acoustic Wave Filter Autolayout Tool[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 在线发布日期: 2018-08-13
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