The ptype Ndoped ZnO thin films are prepared by the magnetron sputtering method with N2 as ptype doping source.The optical properties of Ndoped ZnO films with different doping amounts are studied.The results show that there are two primary and secondary fluorescence peaks at 360 nm and 380 nm,409 nm and 440 nm respectively,and the peak and intensity of the fluorescence peaks will change with different doping amounts of N in the ZnO films.When the flow volume ratio of O2∶N2 is 15∶5,the content of N in the film is maximum, and the intensity of luminescence peak in the fluorescence spectrum is the best.The Hall effect detection shows that the film has obvious ptype conductivity.