Abstract:In order to predict the thermal behavior of bulk acoustic wave resonator(BAWR) and evaluate the power handling capacity,a BAWR thermal behavior simulation method is proposed.Firstly,the surface loss of the conductor in the BAWR electromagnetic model is extracted and used as a heat source for the thermal simulation to obtain the temperature distribution of the resonator.Then the signalfeedingedge,active area shape and power handling capacity are investigated.The simulation results show that,in order to weaken the selfheating effect of 〖JP2〗BAWR,the signal feeding should follow the principle of “long edge feedin,long edge feedout”;the shape of the active area has little effect on the selfheating effect,and the power handling capacity of the designed BAWR can reach 3 W.