The piezoelectric ceramic,as an actuator in the atomic force microscope (AFM) system,can quickly trace the appearance of the measured sample.In order to improve the positioning accuracy and response speed of PZT actuators,according to the principle of the voltagecontrolled driving power,a highprecision dynamic PZT driving power was designed based on the high voltage operational amplifier PA85A.The factors that affect the accuracy and dynamic performance of system were analyzed;the method for phase compensation was adopted to improve the stability of the system.The results show that this power has the features of highprecision,fast dynamic response,high stability,which can be effectively applied to the AFM system.