Abstract:In order to solve the problem of driving technology in micronano operation, a stickslip driving miniature motion platform has been developed in this paper. Based on the constructed platform structure, the dynamic model of the stickslip driving system has been established. The electric model of the piezoelectric stack and the mechanical dynamic model of the driving and transmission system are modeled respectively on the basis of introducing the LuGre friction model into the dynamics model. Finally, a unified stickslip driving system model has been obtained and the simulation and analysis of the model have been carried out by using the Matlab/Simulink. The analysis results show that the displacement of the platform decreases with the increase of the pressure, and increases with the increase of the mass of the mobile station. Finally, after comparing the experimental results with the simulation data, the two are basically the same, which verifies the accuracy of the model.