In order to study the micro mechanical properties and processing methods of single crystal silicon carbide (SiC),the micro and nano indentation experiment on the single crystal 6HSiC (0001) are carried out. The numerical simulation of nano indentation is completed by ABAQUS and the experimental verification is completed.The results show that during the loading stage the deformation mechanism of single crystal SiC has nothing to do with the indentation load,the hardness and elastic modulus show obvious size effect.The stress value under the action of spherical indenter is the minimum,and the stress value under the action of the Berkovich indenter and the Vickers indenter is the same,which is greater than the stress value of the Cone indenter.The types of indentation crack mainly include the main crack,lateral crack,primary and secondary cracks,straight crack and discontinuous crack. The average length of cracks increases with the increasing of loading force.