用于气体传感的电容式微机械超声阵列设计
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国家自然科学基金国际(地区)合作与交流基金资助项目[NSFCANR项目(中法)]

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Design of Capacitive Micromachined Ultrasonic 〖JP〗Transducer Array for Gas Sensing
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    摘要:

    电容式微机械超声阵列(CMUT)是微机电系统(MEMS)气体传感器的常用结构之一。为了在尽可能降低功耗的前提下,提高气体传感器的灵敏度,对电容式微机械超声阵列尺寸进行优化。首先基于一阶集总电机械振动模型进行理论分析,发现其灵敏度与塌陷电压成正相关,并主要受振膜厚度、电极间距和电极半径影响,以此为依据设计符合要求的参数。然后使用COMSOL多物理场仿真软件,综合结构特点、空气阻尼、外接电路、弹性软化等因素的影响,提出一种更接近实际的有限元模型。将理论分析结果代入,对尺寸参数进行进一步优化,得到塌陷电压11.3 V,灵敏度-3.253×1017 Hz/kg,共振频率4.858 MHz,品质因数121.45的电容式微机械超声阵列。

    Abstract:

    The capacitive micromachined ultrasonic transducer (CMUT) array is one of the commonly used structures of MEMS sensors. To reduce the power consumption and improve the sensitivity of the gas sensor, the dimension and structure of the CMUT array are optimized. First, with the theoretical analysis of the firstorder lumped electromechanical vibration model, it is found that the sensitivity of the CMUT is positively correlated with the collapse voltage and they are mainly affected by the thickness of the diaphragm, the electrode spacing and the electrode radius. The parameters of CMUT are designed to meet with those requirements. Then a more practical finite element model is proposed, which combined with the structural characteristics, air damping, external circuits, elastic softening and other factors by using COMSOL Multiphysics simulation software. The theoretical analysis results are substituted into the model to further optimize the parameters of CMUT. Finally, a CMUT array with collapse voltage of 11.3 V, sensitivity of -3.253×10 17 Hz/kg, resonant frequency of 4.858 MHz and quality factor of 121.45 has been developed.

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卓文军,吴丽翔,陈曦,王俊力,王高峰.用于气体传感的电容式微机械超声阵列设计[J].压电与声光,2018,40(6):896-900. ZHUO Wenjun, WU Lixiang, CHEN Xi, WANG Junli, WANG Gaofeng. Design of Capacitive Micromachined Ultrasonic 〖JP〗Transducer Array for Gas Sensing[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 在线发布日期: 2018-12-20
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