In order to improve the sensitivity of the micro positioning system, a new configuration of threedegreesoffreedom parallel piezoelectric micro positioning system is designed. First, on the basis of the symmetry of the platform structure, the double parallel four linkage mechanism is used to design the platform, and the load module and sensor installation module which can be integrated into the platform are also designed. Then, the finite element method is used to analyze the displacement, stress, stiffness and mode of the platform. Finally, the displacement and frequency response characteristics of the platform are tested based on the experimental system built. The experimental results show that the maximum displacement of the platform along the x direction is 26.0 μm under the action of 120 V voltage (the parasitic displacement generated along the y direction is 141.0 nm),and the maximum displacement along the y direction is 25.9 μm (the parasitic displacement along the x direction is 39.7 nm),and the maximum rotation angle along the z axis is 210 μrad, and the displacement resolution of the platform along x and y directions is 6.5 nm; the natural frequencies of platform along x, y and θz are 328.0 Hz,481.3 Hz and 402.8 Hz respectively.