基于磁致伸缩多层膜的磁声表面波传感器
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国家自然科学基金资助项目(61871081);电子信息控制重点实验室基金资助项目

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Magnetic Surface Acoustic Wave Sensor Based on Magnetostrictive Multilayered Films
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    摘要:

    研究了一种基于FeCoSiB/SiO2多层膜的磁声表面波(MSAW)传感器,其中FeCoSiB/SiO2多层膜制备在石英声表面波(SAW)谐振器上。在外加磁场发生变化时,FeCoSiB/SiO2多层膜通过巨杨氏模量效应影响压电衬底表层的相速度,进而改变SAW的谐振频率。通过设计和优化磁致伸缩多薄膜的结构和软磁性能,不仅获得磁致伸缩层总厚度与谐振器品质因数的关系,而且成功使磁敏传感器的灵敏度(Δf/H,即施加单位磁场时的谐振频率的变化量)提升了2个数量级,达到419 Hz/μT。在此基础下,探讨了Δf-H曲线在难、易轴方向表现出蝴蝶型和回线型特性的机理。由于该传感器具有很高的磁场灵敏度和良好的方向选择性,在微弱磁场(如地磁场)检测领域将具有极高的实用价值

    Abstract:

    In current work, a magnetic surface acoustic wave (MSAW) sensor composed of FeCoSiB/SiO2 multilayer film is studied. The FeCoSiB/SiO2 multilayer film is deposited on a traditional quartz surface acoustic wave resonator. When the applied magnetic field changes, the FeCoSiB/SiO2 multilayer film affects the phase velocity of the surface layer of the piezoelectric substrate by the giant Young’s modulus effect, thereby changing the resonant frequency of the SAW. By optimizing the soft magnetic properties and designing the structure of the magnetostrictive multilayer film, not only the relationship between the total thickness of the magnetostrictive layer and the quality factor of the resonator is obtained, but also the sensitivity of the magnetic sensor (Δf/H, i.e., the variation of the resonance frequency when the unit magnetic field is applied) is improved by 2 orders of magnitude to 419 Hz/SymbolmA@T. On this basis, the mechanism of butterflylike and looplike Δf-H curves showing along the hard and the easy axis was studied. Because of its high magnetic field sensitivity and good directional selectivity, the MSAW sensor will be of extremely high practical value in the field of weak magnetic field (such as geomagnetic field) detection.

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刘力,刘国,刘婉,鲁亚巍,白飞明.基于磁致伸缩多层膜的磁声表面波传感器[J].压电与声光,2019,41(3):335-339. LIU Li, LIU Guo, LIU Wan, LU Yawei, BAI Feiming. Magnetic Surface Acoustic Wave Sensor Based on Magnetostrictive Multilayered Films[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 在线发布日期: 2019-06-21
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