In this paper, the finite element modeling and harmonic response simulation of the stator of the hollow traveling wave ultrasonic motor (TRUMH) developed by our laboratory are carried out. It is found that the setting of the damping ratio of the stator has a great influence on the accuracy of the simulation results. The modal parameters of the stator are measured by the Doppler laser vibration measurement system, and the modal damping ratio of the stator is calculated by the half power bandwidth method. The simulation results are basically consistent with the measured results after substituting the model. The frequency simulation error and the amplitude simulation error of B011 working mode are 1.66% and 4.61% respectively. The stator teeth characteristics are parameterized, and the influences of the pitch and tooth height on the stator mode are analyzed. According to the design goal of motor with low speed and high torque, the suitable teeth parameters are selected and a new stator is fabricated. The finite element simulation based on the same damping ratio is performed again and the laser vibration measurement of the new stator is carried out. By comparison, the frequency simulation error and amplitude simulation error of B011 working mode are 0.62% and 1.94% respectively, which verify the accuracy of the finite element harmonic response simulation. In addition, the performance tests of two motors assembled from the original stator and the new stator are carried out. The maximum noload speed of the new one is decreased by 30%, while the stall torque is increased by 20%, which are in line with the expected design. The accurate parametric finite element model is helpful to speed up the design of ultrasonic motor and improve the efficiency of the selection of design parameters that meet the target function of the motor.