薄膜体声波谐振器的研究与仿真
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国家自然科学基金面上基金资助项目(KKGA201607014)

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Study and Simulation of Film Bulk Acoustic Resonator
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    摘要:

    随着5G通信技术的发展,射频前端器件趋向于集成化、微型化,使得薄膜体声波谐振器(FBAR)技术成为通信领域的研究热点之一。该文对FBAR谐振单元选择不同阶数的梯形级联方式,通过射频仿真软件ADS建立MBVD等效电路模型,实验仿真其性能参数输出曲线,设计出频带区间在工信部规划的5G通信频段(4.8~5.0 GHz)标准内的高频窄带滤波器。实验仿真结果表明,所设计的FBAR频带在4.849~4.987 GHz,增加FBAR单元的级联阶数可以提高带外抑制,其插入损耗很小,满足5G通信系统对滤波器的性能参数要求。

    Abstract:

    With the development of 5G communication technology, RF frontend devices tend to be integrated and miniaturized, making the film bulk acoustic resonator (FBAR) technology one of the research hotspots in the field of communication. In this article, the trapezoidal cascade method is selected for different order number of FBAR resonant unit, and the MBVD equivalent circuit model is established by using the RF simulation software ADS. The performance parameter output curve of FBAR is simulated by experiment, and a high frequency narrowband filter within the 5G frequency band (4.8~5.0 GHz) standard planned by the Ministry of Industry and Information Technology is designed. The experimental results show that the designed FBAR frequency band is at the range of 4.849~4.987 GHz. It is found that the increase of cascade order of FBAR unit can significantly improve the outofband rejection and the insertion loss is low, which satisfies the performance parameters requirements of the 5G communication system for the filter.

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陈鹏光,王瑞,马琨,陈剑鸣.薄膜体声波谐振器的研究与仿真[J].压电与声光,2019,41(3):378-382. CHEN Pengguang, WANG Rui, MA Kun, CHEN Jianming. Study and Simulation of Film Bulk Acoustic Resonator[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 在线发布日期: 2019-06-21
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