The combination of micro/nano processing technology and vibration inertial technology has brought about major changes in inertial instrumentation technology, greatly expanding the application of inertial technology in military and civilian applications. Highperformance microinertial devices are playing an increasingly important role in the development of military equipment and the national economy. Based on the recent support programs of the defense advanced research projects agency (DARPA) in the field of microinertial sensor technology in recent years, the latest development status of microinertial sensor technology, such as millihemispherical resonator gyro (mHRG), microoptical gyroscope (MOG), SAW gyroscope and MIMU, is comprehensively studied in this work. The technical challenges faced by their developments are analyzed and reviewed.