Aiming at the complex problem of changing the direction and intensity of wave propagation in the Rayleigh wave devices, a multiinterdigital Rayleigh wave device structure and a threedimensional modeling scheme are proposed in this paper. The threedimensional modeling scheme uses finite element analysis to approximate the real device structure and size such as piezoelectric substrate and interdigital transducer. The chosen piezoelectric substrate material is 128°YXLiNbO3, and the interdigital transducer is an Al electrode. The threedimensional model experiment is carried out on the multiinterdigital Rayleigh wave device with the number of interdigital transducers of 4, 6, and 8 respectively, and the feasibility of the device is verified. The experimental results show that the multiinterdigital Rayleigh wave device can generate Rayleigh waves at different angles. The generated wave only has the particle displacement components in the x and y directions, and the maximum displacement of the particles is mainly concentrated on the center of the device surface. In addition, the modal frequency and maximum displacement of the device will increase with the increase of number of interdigital transducers. Therefore, the generated Rayleigh wave intensity and the mixing performance of the device are also enhanced.