一种新型电调FBAR结构的仿真分析
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国家自然科学基金资助项目(51875534)

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Simulation Analysis of a Novel Type of Voltage Tuned FBAR Structure
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    摘要:

    针对目前薄膜体声波谐振器(FBAR)调谐范围小的问题,提出了一种新型电调FBAR结构,在传统FBAR的压电薄膜和底电极之间引入一层n型掺杂AlN半导体(nAlN)薄膜。利用COMSOL Multiphysics对新型FBAR进行建模仿真计算,得到其谐振频率为1.92 GHz,阻抗特性曲线中存在寄生谐振峰,通过调整顶电极厚度进行优化,结果表明,当顶电极厚为0.1 μm时,寄生谐振峰消失,此时器件谐振频率为1.976 GHz,且顶电极厚度调整后器件整体性能有较大提升。对优化后的新型FBAR进行电调仿真分析,得到其调谐量为600 kHz/V,比传统FBAR的150 kHz/V有很大的提高,另外,仿真结果显示,谐振频率与外加调谐电压呈指数正相关。

    Abstract:

    Aiming at the problem of small tuning range of film bulk acoustic resonator (FBAR), a novel voltage tuned FBAR structure was proposed. A layer of doped AlN semiconductor (nAlN) film was introduced between the piezoelectric film and the bottom electrode of the traditional FBAR. The COMSOL Multiphysics was used to model and simulate the novel FBAR, the obtained resonant frequency is 1.92 GHz, and the parasitic resonance peak exists in the impedance characteristic curve, which is optimized by adjusting thickness of the top electrode structure. The result shows that when the thickness of the top electrode is 0.1 μm, the parasitic resonance peak disappears, and the resonant frequency of the device is 1.976 GHz, the overall performance of the device after thickness adjustment of the top electrode is greatly improved. The electronic tuning simulation analysis of the optimized FBAR shows that the tuning amount is 600 kHz/V, which is greatly improved compared with the traditional FBAR of 150 kHz/V. In addition, the simulation results show that the resonance frequency is exponentially positively correlated with the external tuning voltage.

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吴永盛,苏淑靖,翟成瑞,张佳俊,王少斌.一种新型电调FBAR结构的仿真分析[J].压电与声光,2019,41(4):501-503. WU Yongsheng, SU Shujing, ZHAI Chengrui, ZHANG Jiajun, WANG Shaobin. Simulation Analysis of a Novel Type of Voltage Tuned FBAR Structure[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 在线发布日期: 2019-08-26
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