La和Sr的掺杂对PZT薄膜电学性质的影响
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重庆市重点产业共性关键技术创新专项基金资助项目(cstc2016zdcyztzx0034)

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Effect of La and Sr Codoping on Electric Properties of PZT Thin Films
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    摘要:

    该文采用溶胶凝胶法在LaNiO3/Pt/Ti/SiO2/Si基片上制备了掺杂La元素的Pb1-0.05La0.05ZrTiO3(PLZT)、掺杂Sr元素的Pb1-0.05Sr0.05ZrTiO3(PSZT)、掺杂La和Sr元素的Pb1-0.1La0.05Sr0.05ZrTiO3(PLSZT)及未掺杂的锆钛酸铅(PZT)薄膜样品。对不同掺杂情况的样品分别进行了压电系数、电滞回线、介电特性的测试。结果表明,双掺杂样品PLSZT薄膜具有比其他样品更好的铁电性能,其剩余极化强度(Pr)为13.2 μC/cm2,饱和极化强度(Ps)为28.4 μC/cm2,矫顽场(Ec)为54.8 kV/cm;双掺杂样品PLSZT薄膜的压电系数(d33)比其他3种样品高,达到153 pC/N。掺杂后的样品与未掺杂的样品相比,其介电常数有略微提高;单掺杂La的样品的介电特性在高频环境下更稳定。

    Abstract:

    In this paper, the PZT thin film samples with La doped Pb1-0.05La0.05ZrTiO3(PLZT), Sr doped Pb1-0.05Sr0.05ZrTiO3(PSZT), La and Sr codoped Pb1-0.1La0.05Sr0.05ZrTiO3(PLSZT) as well as undoped PZT thin film were prepared by SolGel method on LaNiO3/Pt/Ti/SiO2/Si substrate. The piezoelectric coefficients, hysteresis loops and dielectric properties of the samples with different doping conditions were tested. The results show that the PLSZT thin films have better ferroelectric properties with the residual polarization intensity (Pr) of 13.2 μC/cm2, the saturated polarization intensity (Ps) of 28.413.2 μC/cm2, and the coercive field (Ec) of 54.8 kV/cm over other samples, and the piezoelectric coefficient (d33) of doubledoped PLST is also higher than that of the other three samples, reaching 153 pC/N. The dielectric constant of the doped sample is slightly higher than that of the undoped sample, and the dielectric property of the singledoped La sample(PLZT) is more stable at high frequency environment.

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李伟,郑伟,丁长路,张宏宇. La和Sr的掺杂对PZT薄膜电学性质的影响[J].压电与声光,2019,41(4):513-516. LI Wei, ZHENG Wei, DING Changlu, ZHANG Hongyu. Effect of La and Sr Codoping on Electric Properties of PZT Thin Films[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 在线发布日期: 2019-08-26
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