Abstract:When the piezoelectric ceramic drive power supply works in a capacitive load, proper loop compensation is a necessary condition for the stable operation of the power supply. In order to improve the response speed of PZT actuators and improve the shortcomings that the traditional compensation method can only compensate the single poles, in the case of analyzing the traditional PZT driving power compensation method, a highprecision broadband PZT driving power compensation method is proposed. The loop compensation of the largecapacity load drive circuit with low pole frequency and multipole is realized. When the PZT actuators with equivalent capacitance of 64 μF is under load, the bandwidth of the prototype is up to 5 kHz, the rising time and the falling time is only 200 μs, and the ripple voltage is less than 80 mV. The experimental results show that the proposed method has excellent bandwidth and good stability, and can be applied to piezoelectric applications such as robots, microdisplacement motion platforms and aerospace.