Abstract:In the field of micromanipulation, the motion platform is required to realize highprecision pose adjustment in a small space. Based on this, this paper proposes an inertial stickslip precision spanning positioning motion platform with an overall size of only 10 mm×10 mm×10 mm. The design scheme that integrates the inertial portion with the slider portion is used, and the friction is provided by a magnet. The size optimization of the flexible hinge in the inertial stickslip motion platform is carried out and checked by finite element analysis software to verify the correctness of theoretical analysis. The test result of the prototype shows that the maximum moving speed in the horizontal direction is 4.966 mm/s, the moving speed in the vertical direction is 2.1 mm/s, and the maximum singlestep displacement in the forward and reverse directions is 2.984 μm and 2.349 μm, respectively. The repeatability of the step length is good. The experiment proves that the prototype has the characteristics of small volume, fast moving speed, stable step length and the like, and is suitable for highprecision motion in a narrow space.