一种大容性负载的压电陶瓷驱动电源设计
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国家重点专项基金资助项目(2017ZX02101007003); 国家自然科学基金资助项目(61565004)

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Design of a Piezoelectric Ceramic Drive Power Supply With Large Capacitive Load
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    摘要:

    压电陶瓷作为微定位系统的动能器件,可达到纳米级的位移精度。针对位移驱动型压电陶瓷的大容性负载特点,基于PA92设计了一种高精度、大电流的动态驱动电源。通过电容超前反馈、隔离电阻结合反馈及相位补偿等方式提高了电源的稳定性。分析结果表明,该电源能有效应用于纳米级定位系统中,在大容性负载时具有良好的动态性能,输出电压精度可达0.5 mV。

    Abstract:

    As the actuator of micropositioning system, the piezoelectric ceramic can achieve nanometerscale displacement accuracy. In view of the large capacitive load characteristics of displacementdriven piezoelectric ceramics, a highprecision, highcurrent dynamic drive power supply is designed based on PA92. The stability of power supply is improved by the means of the capacitor lead feedback, isolation resistor combined with feedback and phase compensation. The analysis results show that the power supply can be effectively applied to the nanoscale positioning system, and has good dynamic performance under large capacitive load, and the output voltage accuracy can reach 05 mV.

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钱存,张文涛,杜浩,熊显名.一种大容性负载的压电陶瓷驱动电源设计[J].压电与声光,2019,41(5):752-755. QIAN Cun, ZHANG Wentao, DU Hao, XIONG Xianming. Design of a Piezoelectric Ceramic Drive Power Supply With Large Capacitive Load[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 在线发布日期: 2019-10-18
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