Abstract:AlN contourmode resonator (CMR) can meet the needs of modern wireless communication for single chip, multiband, reconfigurable multifrequency sources, and has great application prospects. Aiming at the current design method without a specific single CMR frequency point, a CMR design method combining the influence factor analysis of CMR performance parameters and the finite element calculation is proposed in this paper. Firstly, the influence factors of the main performance parameters of CMR, such as the resonance frequency, the quality factor, the electromechanical coupling coefficient and the dynamic resistance, are analyzed theoretically to get the initial size of the CMR; Then the geometric model of CMR is established by using COMSOL finite element software and the corresponding frequencyadmittance curve and frequencyquality factor curve are obtained by solving frequency domain. According to the simulation results and theoretical calculations, the initial structural size of CMR is optimized and simulated. An AlN CMR with resonant frequency of 300 MHz, quality factor of about 1 010 and electromechanical coupling coefficient of about 1.64% is designed.