高次谐波体声波谐振器的频率修正方法研究
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国家自然科学基金资助项目(11804256);中国科学院重点部署基金资助项目(QYZDYSSWJSC007)

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Study on Frequency Correction Method of Highovertone Bulk Acoustic Resonator
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    摘要:

    基于高次谐波体声波谐振器(HBAR)的一维纵向振动模型,研究了获得工作在某一谐振频率HBAR的几种频率修正方法,即减薄基底或顶电极,或在其表面沉积薄膜,并讨论了频率修正前后其有效机电耦合系数(K2eff)和机械品质因数(QM)的变化情况。结果表明,对于该文结构的HBAR,减薄基底的频率修正方法最佳,其对K2eff和QM的影响最小;若选择沉积薄膜法进行频率修正,其对K2eff的影响不大,但对QM的影响较大,故宜选择沉积低损耗的材料。

    Abstract:

    Based on the onedimensional longitudinal vibration model of highovertone bulk acoustic resonator (HBAR), several frequency correction methods for HBAR operating at a certain resonance frequency, namely, thinning the substrate or top electrode,or depositing thin films on their surface,are studied. And the changes of effective electromechanical coupling coefficient(K2eff) and mechanical quality factor(QM) before and after frequency correction are discussed.The results show that for the HBAR structure of this paper,the frequency correction method of thinning the substrate is the best, and the influence on K2eff and QM is the least.If adopting the frequency correction of depositing thin film, it is better to choose the materials with low attenuation since it has great impact on QM while little impact on K2eff.

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肖佩芸,李鉴,郑天,田裕康,程建政.高次谐波体声波谐振器的频率修正方法研究[J].压电与声光,2019,41(6):789-792. XIAO Peiyun, LI Jian, ZHENG Tian, TIAN Yukang, CHENG Jianzheng. Study on Frequency Correction Method of Highovertone Bulk Acoustic Resonator[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 在线发布日期: 2019-12-19
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