Abstract:The ZnO/AlN/diamond temperature compensation structure is modeled and analyzed by COMSOL software in this paper. The frequency temperature coefficient (TCF), sound velocity (v), and electromechanical coupling coefficient (k2) of Love wave mode 0 and mode 1 in the structure are calculated. Besides, the effects of ZnO films thickness (hZnO) and AlN films thickness (hAlN) on these parameters are discussed in detail. The results show that when hZnO=1 μm and hAlN=1.88 μm, a TCF of 0 associated with a v of 9 208 m/s and a k2 of 3.84% are obtained in mode 1 with temperature compensation structure, which means that the temperature compensation structure can be used to design high frequency and temperature compensated surface acoustic wave devices.