In order to realize a stator structure with large thrusttoweight ratio and better profit for miniaturization,an inplane longitudinalbending compound linear ultrasonic motor was designed and developed in this study. The working principle of this type of motor and the forming condition of the elliptical locus of the driving foot of the stator were discussed,and the stator structure was optimized by using the finite element analysis software. A motor prototype was fabricated,the feasibility and rationality of the motor design were verified,and the experimental study on the vibration performance of the stator driving foot and the output performance of the motor were carried out. The results showed that under the conditions of the peaktopeak excitation voltage of 200 V,the prepressure of 20 N,the excitation frequency of 45.7 kHz,and the phase difference of 90°, the noload speeds of the motor in the left and right directions are 0.25 m/s and 0.22 m/s,respectively, and the maximum thrust was 3.4 N and the thrusttoweight ratio was 47 (the stator mass was 7.36 g).Compared with the prototype of the inplane longitudinalbending linear ultrasonic motor, the amplitude of driving foot of the slotted stator was increased, and the output speed and thrust of the motor were increased significantly (the noload speed was increased by 51.5% and the maximum thrust was increased by 36%),which is beneficial to the miniaturization of linear ultrasonic motor.