Abstract:For the purpose of increasing the displacement output accuracy of the piezoelectric micropositioning stage, the pole configuration proportional, integral, derivative(PID) controller is designed to control the stage. Firstly, based on the analysis of electrical and electromechanical characteristics of the piezoelectric actuator, the mathematical model of the piezoelectric actuator is established. Secondly, based on the force analysis and motion analysis of the stage, the dynamic model of the platform is established. Then, when the imaginary part of the pole of the stage is kept unchanged, and the closedloop damping ratio of the system is taken as 1, the pole of the stage is translated along the direction parallel to the real axis, and the PID feedback controller of the stage is designed. Finally, the effectiveness of the designed controller is verified by experiments. The experimental results show that the designed controller can make the platform response faster. Without considering the sensor noise level, the positioning error of the platform under the control system is basically zero.