In order to improve the detection sensitivity of quartz crystal microbalance (QCM), a QCM with indium tin oxide (ITO) electrode structure is proposed in this paper. The finite element analysis software is used to reduce the calculation amount in the electrode region of QCM chip by density equivalent method. On the basis of QCM with ideal trapping effect obtained by optimizing electrode size, ITO electrodes with good conductivity, smoothness and transparency were obtained by controlling gas pressure and working voltage and current of magnetron sputtering. The results of oscillation frequency test and mass sensitivity analysis show that the frequency stability of QCM with ITO electrode is good (frequency variation is only 3 Hz), and the mass sensitivity is 1.5 times of that of gold electrode QCM.